Journal of Vacuum Science & Technology A

Publisher:Published by AVS through the American Institute of Physics
ISSN:0734-2101
E-ISSN:1520-8559
Categories:Engineering - Electronics
Engineering - Mechanical Engineering
Material Science and Metallurgy - Coatings and Films
Material Science and Metallurgy - General and Others
Material Science and Metallurgy - Nanomaterials
Physics - General and Others
Physics - Plasma Physics
Available online:AvailabilityUsage Restrictions
AIP Journals CompleteAvailable from 1983/01/01 volume: 1E-Reserve CMS Course Packs Link Print More Info
Available in the library:
UofS Library CatalogueAvailable from 1983 volume: 1 until 1987 volume: 5
Available from 2000 until 2007
Available from 2008 volume: 26 until 2011 volume: 29 issue: 1