Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Publisher:by the American Institute of Physics for the AVS
Categories:Engineering - Electronics
Engineering - Instrumentation
Engineering - Mechanical Engineering
Engineering - Metrology
Material Science and Metallurgy - Nanomaterials
Physics - General and Others
Physics - Plasma Physics
Available online:AvailabilityUsage Restrictions
AIP Scitation Journals CompleteAvailable from 1999 volume: 17 issue: 1E-Reserve CMS Course Packs Link Print More Info
Available in the library:
UofS Library CatalogueAvailable from 1983 volume: 1 until 1987 volume: 5