Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
| Publisher: | by the American Institute of Physics for the AVS |
| ISSN: | 0734-211X |
| E-ISSN: | 2327-9877 |
| Categories: | Engineering - Electronics Engineering - Instrumentation Engineering - Mechanical Engineering Engineering - Metrology Material Science and Metallurgy - Nanomaterials Physics - General and Others Physics - Plasma Physics |
| Available online: | Availability | Usage Restrictions |
|---|---|---|
| AIP Scitation Journals Complete | Available from 1999 volume: 17 issue: 1 | E-Reserve CMS Course Packs Link Print More Info |
| Available in the library: | |
|---|---|
| UofS Library Catalogue | Available from 1983 volume: 1 until 1987 volume: 5 |